Reddit reviews Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems
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Used Book in Good Condition
I used to be a nanosystems engineering major, most nano engineering is geared towards MEMS and MOSFET production (think mechEng at a tiny scale)
http://www.amazon.com/gp/product/0982299109
http://www.amazon.com/Introduction-Microelectronic-Fabrication-Modular-Devices/dp/0201444941